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Rudolph IV Ellipsometer
Summarize
Rudolph IV Ellipsometer
Thomas Grimsley
Owned by
Thomas Grimsley
Last updated:
Jan 11, 2024
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Facts
Model Auto-EL IV
The Rudolph Ellipsometer has three incident wavelengths
4050A, 6328A, and 8300A
Personnel
Tool Engineer -
Richard Battaglia
Process Engineer -
Sean O'Brien
Superuser -
Karl Hirschman
Tool & Process Information
Manuals & Users
Rudolph Ellipsometer Manual
Rudolph Ellipsometer Certification Checklist
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