Rudolph IV Ellipsometer

Facts

• Model Auto-EL IV
• The Rudolph Ellipsometer has three incident wavelengths
  • 4050A, 6328A, and 8300A

Personnel

• Tool Engineer - Richard Battaglia
• Process Engineer - Sean O'Brien
• Superuser - Karl Hirschman

Tool & Process Information

Manuals & Users

• Rudolph Ellipsometer Manual
• Rudolph Ellipsometer Certification Checklist