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Bruce 1 - Tube 3
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Facts
Tube 3 is used for diffusion and drive-in of n-type dopants.
Wafers are loaded into quartz boats - current sizes include 100mm & 150mm.
Other Tubes
Personnel
Tool Engineer -
Process Engineer - Sean O'Brien
Process Engineer - Patricia Meller
Tool & Process Information
Bruce Furnace Recipe Request Sheet
If a new recipe is needed for the Bruce Furnace, fill out this sheet and return to Sean O'Brien