Bruce 1 - Tube 3

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Facts

Tube 3 is used for diffusion and drive-in of n-type dopants.

• Wafers are loaded into quartz boats - current sizes include 100mm & 150mm.

Other Tubes

• Bruce Tube 1 - Wet Oxide Growth
• Bruce Tube 2 - P type diffusion
• Bruce Tube 3 - N type diffusion
• Bruce Tube 4 - Dry Oxide Growth
• Bruce Tube 5 - External Torch Low Temp Oxide Growth
• Bruce Tube 6 - Wet Oxide Growth
• Bruce Tube 7 - Anneal
• Bruce Tube 8 - High Temp Anneal

Personnel

• Tool Engineer - 
• Process Engineer - Sean O'Brien
• Process Engineer - Patricia Meller

Tool & Process Information

• Bruce Furnace Recipe Request Sheet
  • If a new recipe is needed for the Bruce Furnace, fill out this sheet and return to Sean O'Brien

Manuals & Users

• • Bruce Furnace Manual
  • Bruce Furnace Certification Checklist