Wet Bench - Manual Process 2

Facts

This wetbench is set up for general chemical processing and also has a bath used for HCl decontamination

• Used for general purpose manual chemical processing.
• Heated Quartz Bath for HCl decontamination of wafers after KOH etch.

• This bench has a chemical sink with DI spigot.
• This bench has a Cascade rinse tank.

Personnel

• Tool Engineer - 
• Process Engineer - Sean O'Brien

Tool & Process Information

• Wet Chemical Processing Information

Manuals & Users

• Manual Process #2 Wetbench Manual
• Manual Process #2 Wetbench Certification Checklist