Wet Bench - Ultrasonic

Facts

The ultrasonic wetbench can be used for

• Cleaning large objects with DI & surfactant
• Performing liftoff processes on substrates

Personnel

• Tool Engineer -
• Process Engineer - Sean O'Brien
• Superuser - Patricia Meller
• Superuser - Karl Hirschman
• Superuser - Eli Powell

Tool & Process Information

• Wet Chemical Processing Information

Manuals & Users

• Ultrasonic Wetbench Manual - Rev C - 5/22/20
• Ultrasonic Wetbench Certification Checklist - 8/5/08