Wet Bench - BOE and Pad Etch

Facts

• 10:1 BOE Tank is for general oxide etching.
• Pad Etch Tank is for etching oxide when aluminum is exposed. The etch rate of aluminum will be lower in Pad Etch than in regular BOE. It is important to note that the aluminum does still etch in this solution.
  
  

Personnel

• Tool Engineer -
• Process Engineer - Sean O'Brien
• Process Engineer - Patricia Meller

Tool & Process Information

• Process Information on Oxide Wet Etching