PE4400 Sputter
Facts
- The PE24400 stepper is a RF Sputter Tool.
- Designed as a sputter down system.
- It is a loadlocked system.
- It has sputter etch capability for pre-cleaning substrates prior to sputter deposition.
- Three 8" water cooled targets.
- The system has a large, flat platen that the samples simply rest on. It can accommodate many types of substrates.
Personnel
- Tool Engineer - John Nash
- Process Engineer - Sean O'Brien