PE4400 Sputter

Facts

• The PE24400 stepper is a RF Sputter Tool.
  • Designed as a sputter down system.
  • It is a loadlocked system.
  • It has sputter etch capability for pre-cleaning substrates prior to sputter deposition.
  • Three 8" water cooled targets.

• The system has a large, flat platen that the samples simply rest on. It can accommodate many types of substrates.

Personnel

• Tool Engineer - John Nash
• Process Engineer - Sean O'Brien

Tool & Process Information

Manuals & Users

PE4400 Sputter System Manual
PE4400 Certification Checklist