PE4400 Sputter

Owned by Thomas Grimsley
Last updated: Jan 10, 2024

Facts

  • The PE24400 stepper is a RF Sputter Tool.
    • Designed as a sputter down system.
    • It is a loadlocked system.
    • It has sputter etch capability for pre-cleaning substrates prior to sputter deposition.
    • Three 8" water cooled targets.
  • The system has a large, flat platen that the samples simply rest on. It can accommodate many types of substrates.

Personnel

Tool & Process Information

Manuals & Users

PE4400 Sputter System Manual
PE4400 Certification Checklist