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AG 610A RTP
AG 610A RTP
- Thomas Grimsley
Owned by Thomas Grimsley
Facts
- The AG 610 RTP - is for rapid thermal annealing (RTP) of MOS grade wafers
- Typical use is annealing out damage caused by ion implant to the silicon crystal structure.
Personnel
- Tool Engineer - Rich Battaglia
- Process Engineer - Sean O'Brien
Super User - Matt Seitz