AG 610A RTP

Facts

• The AG 610 RTP - is for rapid thermal annealing (RTP) of MOS grade wafers
  • Typical use is annealing out damage caused by ion implant to the silicon crystal structure.

Personnel

• Tool Engineer - Rich Battaglia
• Process Engineer - Sean O'Brien

• Super User - Matt Seitz

Manuals & Users

• AG610 RTP Manual