AG 610A RTP
- Thomas Grimsley
Owned by Thomas Grimsley
Facts
- The AG 610 RTP - is for rapid thermal annealing (RTP) of MOS grade wafers
- Typical use is annealing out damage caused by ion implant to the silicon crystal structure.
Personnel
- Tool Engineer - Rich Battaglia
- Process Engineer - Sean O'Brien
Super User -Â Matt Seitz