Varian 350D Implanter

Owned by Thomas Grimsley

Dec 19, 2017

Facts

The Varian 350D is a medium current ion implanter set up for boron and phosphorous implants.

Set up for 100mm and 150mm round substrates

Personnel

Tool Engineer - Rich Battaglia
Process Engineer - Sean O'Brien
Process Engineer - Patrica Meller

Manuals & Users