Varian 350D Implanter

Facts

The Varian 350D is a medium current ion implanter set up for boron and phosphorous implants.

• Set up for 100mm and 150mm round substrates

Personnel

• Tool Engineer - Rich Battaglia
• Process Engineer - Sean O'Brien
• Process Engineer - Patrica Meller

Manuals & Users

• Varian 350D Ion Implanter Manual
• Varian Certification Checklist