Bruce 2 - Tube 8

Facts

Tube 8 is used for the high temperature annealing of silicon substrates.

• Tube is considered contaminated - not qualified for MOS grade process.
• It is equipped with heating elements capable of 1200C and has a silicon carbide tube
• Currently plumbed with nitrogen. Operated in manual mode.
• Wafers are loaded into quartz boats - current size is 100mm.

Other Tubes

• Bruce Tube 1 - Wet Oxide Growth
• Bruce Tube 2 - P type diffusion
• Bruce Tube 3 - N type diffusion
• Bruce Tube 4 - Dry Oxide Growth
• Bruce Tube 5 - External Torch Low Temp Oxide Growth
• Bruce Tube 6 - Wet Oxide Growth
• Bruce Tube 7 - Anneal
• Bruce Tube 8 - High Temp Anneal

Personnel

• Tool Engineer - 
• Process Engineer - Sean O'Brien
• Process Engineer - Patricia Meller

Tool & Process Information

• Bruce Furnace Recipe Request Sheet
  • If a new recipe is needed for the Bruce Furnace, fill out this sheet and return to Sean O'Brien

Manuals & Users

• • Bruce Furnace Manual
  • Bruce Furnace Certification Checklist