Bruce 2 - Tube 7


Facts

Tube 7 is used for the annealing & wet oxide growth of silicon substrates.

  • Wafers are loaded into quartz boats - current size is 100mm.
  • Currently reserved for Dr. Hirschman's Research
  • Tube is considered contaminated - not qualified for MOS grade process.

Other Tubes

Personnel

Tool & Process Information

Manuals & Users