Bruce 1 - Tube 1


Facts

Tube 1 is used for the wet oxidation of silicon dioxide.

  • Uses hydrogen gas and oxygen to produce a steam for the faster growth of silicon dioxide.
  • Wafers are loaded into quartz boats - current sizes include 75mm, 100mm & 150mm.
  • Maximum oxide growth is kept to <2um.
  • Clean wafers only - no previous metal processing

Other Tubes

Personnel

Tool & Process Information

Manuals & Users