ASML Stepper

Facts

• The ASML stepper is a 5x stepper with environmental control.
  • Uses 6" x 6" Quartz masks
  • Features on the photomask are reduced 5x down to the printed feature size.
  • Capable of features down to 0.35um in size
  • Field size is 22x22mm
  • Variable Numerical aperture 0.48-0.60
  • Conventional or annular illumination
  • Overlay from layer to layer is better than 50nm

• It is configured for 150mm wafers and uses the mercury i-line 365nm for exposure.

Personnel

• Tool Engineer - John Nash
• Process Engineer - Sean O'Brien
• Super User - Patricia Meller
• Super User - Eli Powell
• Super User - William Huang

• Any of these personnel can certify new users

Tool & Process Information

• Zero Level Etch for ASML Stepper
• Tutorial on the ASML Stepper and how it works
  • Compliments of Dr. Fuller & Stephanie Bolster

Manuals

• ASML Stepper Manual - Rev D - 5/23/22
• ASML Job Creation Manual - Rev E - 4/27/20
• ASML Certification Checklist - 4/27/20