ASML Stepper

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Facts

• The ASML stepper is a 5x stepper with environmental control.

  • Uses 6" x 6" Quartz masks

  • Features on the photomask are reduced 5x down to the printed feature size.

  • Capable of features down to 0.35um in size

  • Field size is 22x22mm

  • Variable Numerical aperture 0.48-0.60

  • Conventional or annular illumination

  • Overlay from layer to layer is better than 50nm

• It is configured for 150mm wafers and uses the mercury i-line 365nm for exposure.

Personnel

• Tool Engineer - John Nash

• Process Engineer - Sean O'Brien

• Super User - Patricia Meller

• Super User - Eli Powell

• Super User - William Huang

• Any of these personnel can certify new users

Tool & Process Information

• Zero Level Etch for ASML Stepper

• Tutorial on the ASML Stepper and how it works

  • Compliments of Dr. Fuller & Stephanie Bolster

Manuals

• ASML Stepper Manual - Rev D - 5/23/22

• ASML Job Creation Manual - Rev E - 4/27/20

• ASML Certification Checklist - 4/27/20