Tencor P2

Facts

The Tencor profilometer is a long scan profilometer that is capable of measuring step heights, stress, surface roughness by moving a stylus over a defined step in the film to be measured.

Film stress can be determined by measuring the difference in wafer curvature before and after a film is deposited.

• Model P2
• Pieces to 8 inch wafers.
• Total step height 100 Å to 300µm with various resolutions (1A at 10um scale)
• Scan length up to 200 mm.
• Stylus radius is 12 microns

Personnel

• Tool Engineer - John Nash
• Process Engineer - Sean O'Brien
• Super User - Patricia Meller
• Super User - Karl Hirschman

Process Information

• Vertical Range of 13um - 1A Resolution
• Vertical Range of 300um - 25A Resolution

Manuals & Users

• Tencor P2 Profilometer Manual
• Tencor P2 Profilometer Certification Checklist