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Suss MJB4 Aligner

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Suss MJB4 Aligner

Sept 05, 2025

Facts

  • The Suss MJB4 Contact Aligner is a 1x aligner.

  • The mask is brought into close contact with the substrate.

    • The features on the mask are printed at the intended size for on the substrate - 1x designation.

    • The gap can be made larger for 'sticky' resists - subsequent loss of high frequency information - square corners become rounded.

    • Uses 5" x 5" x 0.09" soda lime photomasks.

  • Capable of features down to 2um in size

  • It is has chucks for a variety of wafer / substrate sizes and uses the mercury broadband for exposure.

Personnel

Manuals & Users

  • Suss MJB4 Contact Aligner Certification Checklist