CEE Resist Developer
Facts
- The CEE Developer is a Manual Photoresist Developer.
- Set up for 100mm, 150mm round substrates
- It has nearby softbake hotplate.
- Chemistry
- This manual developer is set up to dispense CD 26 Developer
Personnel
- Tool Engineer - Rich Battaglia
- Process Engineer - Sean O'Brien
- Super User - Patricia Meller
- Any of these personnel can certify new users