CEE Resist Developer

Facts

• The CEE Developer is a Manual Photoresist Developer.
  • Set up for 100mm, 150mm round substrates
  • It has nearby softbake hotplate.

• Chemistry
  • This manual developer is set up to dispense CD 26 Developer

Personnel

• Tool Engineer - Rich Battaglia
• Process Engineer - Sean O'Brien
• Super User - Patricia Meller
• Any of these personnel can certify new users

Manuals

• CEE Manual Developer Manual - Rev C - 5/11/20
• CEE Manual Developer Certification Checklist - 8/19/08